Possible to run with air-cooled depending on use conditions. Continuous operation under 200Pa. Pumping time to reach 200Pa needs to be within 10 minutes.

Possible to select multiple voltage motors (either 200V class or multiple voltages). Compatible with universal motor and optional explosion-proof motor can be equipped. Compatible with high-efficiency regulation.

Excellent corrosion resistance surface treatment (Optional: T type). High surface hardness and excellent corrosion resistance. The surfaces of all main parts have undergone anodic oxide coating to provide excellent corrosion resistance and surface rigidity. This can restrain scratches and corrosion inside the pump.

Atmospheric pressure start type is effective for pumping time shortening (Option: Inverter). Because the pump can start at the same time as the roughing pump, pumping time can be shorter compared with the standard type.

International standard for the Western market (Compliant with CE and cTUVus).

Evaporation, sputtering, ion plating.

Vacuum drying, freeze drying, vacuum degassing, analytical instruments, leak test system.

Gas exchange, filling, vacuum insulating, heat treatment, melting furnace.

Other various kinds of vacuum systems.