ULK series oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications from research to manufacturing lines.
ULVOIL D-11 is hydrocarbon-based general-purpose oil.
ULVOIL D-31 is the silicon-based diffusion pump oil which heat-resistant stability is high in.
Designed for large critical back-pressure. |
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Extremely stable performance at pressures down to 10-2 Pa (10-4 torr). |
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Use hose flanges (except for vent flanges on ULK-04A and 06A). |
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Pumps can be cleaned easily (parts can be disassembled easily). |
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Come with mechanism to stop flow of operating fluid to auxiliary pump. |
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