The rotary-type multi-sensor has been developed for the crystal oscillation type deposition controller CRTM Series.
CRTS-M6
5MHz or 6MHz crystal 6 pieces-mountable in the rotary type crystal holder.
CRTS-12NS
5MHz crystal 12 pieces-mountable in the rotary type crystal holder.
Both can be used in high-rate vapor deposition and continuous multi-layer vapor deposition.
Having adopted a vacuum stepping motor in the drive section, this is designed to focus on reliability and durability as the top priority, including precisely controlling the stop position of the crystal too. |
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The replacement of the crystal is detachable together with the crystal holder. |
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In case the life of a crystal (abnormal oscillation) is detected, it is automatically switched to the next crystal by the signal from the controller (CRTM). |
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High rate, multi-layer deposition control for Optical, Organic EL, Electric devices. |
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Contact us for more product information and specifications.