Advanced Packaging Device

Batch-type Sputtering Systems SV Series Backside Metalization Sputtering System SRH Series Cluster-type Sputtering System SME-200E


Ashing Systems Luminous NA Series


Cluster-type PE-CVD System CME-200E/400 Load-lock Type Plasma-CVD System CC-200


High-Density Plasma Etching System for R&D NE-550EX Dry Etching System for Production NE-5700 / NE-7800 Dry Etching System for R&D NLD-570 Dry Etching System for Opto-Devices, MEMS NLD-5700


Batch-type Sputtering Systems SV Series Multi-chamber Sputtering System MLX™ -3000N Backside Metalization Sputtering System SRH Series Cluster-type Sputtering System SME-200E


Cluster-type PE-CVD System CME-200E/400 Load-lock Type Plasma-CVD System CC-200


Combined Deposition and Etch modules System uGmni-200, 300