Titanium Getter Pump -
GGT-3 / PGT Series

ULVAC Titanium Getter Pump - GGT-3 / PGT Series

PGT Series


Titanium getter pumps (GGT-3 / PGT series) pass current directly through titanium alloy placed in a vacuum chamber in order to sublimate the titanium. The sublimated titanium creates a large active metallic surface on the surrounding walls for absorbing and removing chemically active gases (H2, N2, O2, H2O, CO, CO2).

Since an active metallic surface made of titanium does not absorb inactive gases (He, Ne, Ar, CH4, C2H6, and other organic gases), these units are used in combination with such equipment as sputter ion pumps and turbo molecular pumps.






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