Dry Vacuum Pump -
LR / HR / UR Series
ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR / HR / UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for Chemical Vapor Deposition (CVD) and etch applications.
ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.