ECO-SHOCK Contributes to Energy Savings
Maximum 80% reduction of power consumption of dry pump. 1
Effective in suppressing heat generation of dry pump resulting in reduction of air conditioning costs. ECO-SHOCK runs with only 65 Watts of power and without N2 and cooling water. NOTE Unusable when pumping flammable and toxic corrosives gases.
Effective when used with capacity transfer type of Dry Pump
Excellent results when used with a multi-stage root type. 2
Very effective when dry pump runs lower than 1000Pa.
Overall Dry Pump Performance is Improved
Improves ultimate pressure performance and reduction in exhaust gas noise. No reduction in pumping speed in all pressure range.
Easy installation by attaching a valve unit to the exhaust pipe. 3
1 A power consumption reduction rate changes depending on mump model, gas volume, etc.
2 ECO-SHOCK could not be used with certain claw root, screw type or shaft seal pumps, etc. Contact ULVAC for details.
3 Modification could be required prior to installation of the ECO-SHOCK. Contact your nearest ULVAC service center for installation.
Power saving for dry pumps used as fore pumps for turbo molecular pump on sputtering and evaporation system.
Power saving for dry pumps used for load lock chambers.
Power saving for dry pumps used for vacuum laminator, vacuum packing, evacuating inert gases such as air, nitrogen or argon, etc.