Cryopump


ULVAC has developed and improved cryopump, based on ULVAC's vacuum technology coupled with the extremely low temperature technologies of Brooks Automation. We offer standard models from 4 inches to 30 inches. Custom types of cryopump are also available.









ULVAC Cryopump - CRYO-U Series

Cryopump -
CRYO-U Series

ULVAC has developed and improved cryopump CRYO-U series, based on ULVAC's vacuum technology and extreme low temperature technologies of Brooks Automation. Our cyro pumps have been used for various fields such as electronics, optics, photovoltaic, nuclear fusion and space development, etc.








ULVAC 4K Cryocoolers - UR4K03

Cryopump -
4K Cryocoolers - UR4K03

For decades, ULVAC has manufactured cryopump systems for semiconductor, LCD and related vacuum industries. The experience in these competitive markets has taught us to build highly reliable and powerful 2-stage Gifford-McMahon refrigerators.

As demands for 4K or pulse-tube cryocoolers increase, we believe our cryocoolers, backed by our proven vacuum and cryogenic technologies, will meet the expectations in the leading-edge industries or R&D fields.