Reactive Process Gas Monitoring System -
Qulee RGM-202 / RGM-302

ULVAC Reactive Gas Process Monitoring System - Qulee RGM-202 / RGM-302

This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes. Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.